Electrical tests laboratory / Thermal and mechanical characterization / Flatness-surface shape measurement
Altimet Altisurf 530
Supplier :
Model :
Purpose :
Metrology of surfaces for microtechnics. Typical application flatness/surface shape measure (z measurement)
CAPABILITY:
Modular metrology platform: 300X300X200mm
Accuracy: 3 µm (z axis)
Tech. specs: mfd 2nm/mm, sigma/step inf. 3nm
2 on-board indexed probes
- 2 Chromatic confocal probes
- Video cameras with stationary zoom for the programming of the measurement areas
3 DC motorized axis: XYZ
Encoders resolution: 0,1 µm
Non-linear axis correction
Hysteresis calibration
Software compatible with Windows XP
