CAPABILITY:

X-ray column:

Max Voltage 160 kV

Max Current 600µA

Sub-micron imaging resolution

3 focusing mode (nanoFocus, microFocus, High Power)

Stage:

X span: 41 cm

Y span: 31 cm

1 µm resolution on the stage position

360° Sample Rotation

Various sample fixturing, Jedec Tray fixture

Manual operation (joystick) or fully programmable inspection