Akrion GAMA cleaning bench

Akrion GAMA cleaning bench

Integrated microsystems laboratory (MEMS) / Wet etching / Wafer cleaning

Akrion GAMA cleaning bench

Supplier :

Model :

Purpose :

Provide wet-chemical wafer cleaning, surface preparation, and etch


Dry-in/dry-out automated SMIF pod input/output operation;

Mini-environment within wet bench secures class 1 clean room performance on the wafer surface;

Real time particle monitoring in chemical tanks;

Multiple lot/recipe processing (up to 4 recipes on single bench at the same time);

High throughput and low cost per wafer;

Real time chemical analysis and concentration adjustments:

To obtain more information about this equipment, email us !