CAPABILITY:

Stainless steel vacuum chamber 18 W x24 H x 18 D inches

One electrode technology shelf-sets with 14 positions

Electrodes are aluminum using ceramics insulators

13.56 MHz RF generator has automatic impedance matching

Power shelf working dimensions 13.74 W x 16.73 D  inches

Ground shelf working dimensions 15.1 W x 16.73 D inches

Automatic RF tuning network, use a L-C tuning network

Gas control with 4 mass flow controllers

Oxygen, argon and nitrogen gas currently available