Integrated microsystems laboratory (MEMS) / Photoresist Stripping and Ashing / Resist strip
SPTS Versalis FxP ISOPOD module
CAPABILITY:
Isopod – In situ resist removal
In situ strip for corrosion prevention
Isotropic polymide removal (dry release)
Integrated microsystems laboratory (MEMS) / Photoresist Stripping and Ashing / Resist strip
CAPABILITY:
Isopod – In situ resist removal
In situ strip for corrosion prevention
Isotropic polymide removal (dry release)