Service offering

Consulting service for the development of manufacturable MEMS processes.

Our team has vast experience in semiconductor industry with speciality in high volume MEMS microfabrication, multi-substrate MEMS, Wafer-Level Packaging (knowledge in Fan-Out), Optical MEMS (MOEMS), NEMS, photonics,  expert  in DRIE and plasma etching,  photolithography, wet etch, material deposition (PECVD, PVD reactive sputtering), wafer-level bonding, etc.

Services

*MEMS device design and simulation.

* MEMS process flow design with high volume manufacturing mindset.

* MEMS Fabrication Prototyping

* Risk analysis and Risk mitigation plan.

* Assist your Fabless business model to bring your device into high volume manufacturing.

Mission

Integration solution for MEMS process microfabrication

Competence

• 20 years experience in semiconductors
• 15 years experience in MEMS industry, multi-substrate MEMS, MOEMS
• 13 years direct experience in DRIE and plasma etching development, wide knowledge in photolithography, wet etch,  striping, deposition,wafer-level bonding, etc.

Technologies and processes

From your MEMS concept:

• Elaborate practical design, considering available technologies.
• Develop the process flow and identify risks at each steps.
• Help to select the right fab to build your prototype.
• Lead the development in laboratories to speed up prototyping development and help trouble shooting.
• Participate to analize electrical, mechanical and optical results. And interact with packaging to optimize device performances.
• Help to select foundry and interact with them to bring the device into production.