This collaboration marks a major milestone in Canada’s efforts to lead in quantum fabrication and strengthen its position in next-generation technology sectors.
Bromont, Québec – May 27, 2025 – The MiQro Innovation Collaborative Centre (C2MI), Canada’s leading hub for innovation in MEMS and semiconductor packaging is proud to announce that part of its new expansion will be dedicated to quantum superconductive chips manufacturing. These state-of-the art manufacturing capabilities from prototype to low volume production are essential to be a key player at the forefront of innovation in the emerging field of quantum computing & sensors. C2MI is thrilled to reveal the acquisition of a specialized, automated Advanced Quantum Cluster PVD System from Angstrom Engineering. This cutting-edge equipment will serve as the centerpiece in C2MI’s new quantum superconductive chips manufacturing facility.
Designed and manufactured in Canada, the Advanced Quantum Cluster PVD System is equipped with a sputtering chamber, a specialized ultra-high vacuum (UHV) tilted e-beam evaporator for Josephson Junction [JJ] aluminum deposition, two oxidation chambers, and an ion milling preparation module. Designed to meet the challenging requirements of superconducting quantum device fabrication. The cluster configuration enables multiple fabrication critical steps to be executed sequentially while staying within the vacuum and controlled environment of the tool. Multiple in-situ metrology and analysis will also allow this tool to perform unprecedented control and quality.
The PVD system’s unique capabilities are essential for creating the highly precise and reliable components required for superconducting quantum circuits, including JJ — a foundational element of quantum processors. This acquisition positions C2MI as a critical enabler of quantum R&D and commercialization for industrial and academic partners.
“The acquisition of this Advanced Quantum Cluster PVD System is the cornerstone of our mission to lead innovation in superconducting quantum chips manufacturing,”said Marie-Josée Turgeon, C2MI’s CEO. “By integrating this equipment into our quantum facility within the already existing and thriving infrastructure dedicated to MEMS and advanced packaging, we are creating unparalleled opportunities for innovation while enabling the development of next-generation quantum technologies that will provide a greater global impact”, she added.
Advancing Canada’s Role in Quantum Technology
C2MI’s new dedicated area focussed on superconducting quantum chip fabrication is an ambitious step in establishing Quebec and Canada as a central player in the global quantum ecosystem. This initiative is part of the broader objectives of promoting collaboration and creating a solid supply chain in quantum technology across Canada. Both C2MI and Angstrom Engineering are the perfect demonstration of Canadian know-how in quantum manufacturing.
“We are proud to embark on a new Canadian project in partnership with C2MI, a groundbreaking endeavor that will be instrumental in propelling domestic quantum computing capabilities to the next frontier. Leveraging our extensive experience in automation, proven radial cluster manufacturing methodologies from global deployments, and deep expertise in quantum-focused systems, we are confident in ensuring the resounding success of this pivotal initiative.” – Stan Amyotte, Angstrom Engineering
About Angstrom Engineering
Founded in 1992, Angstrom Engineering® has rapidly grown into a thriving international company with a reputation for providing highly functional, reliable equipment and unwavering customer support. Their thin film deposition systems are designed and built by their team of qualified and experienced engineers. Find out more about this company: www.angstromengineering.com
About C2MI
The MiQro Innovation Collaborative Center (C2MI) serves as a reference in research and development to accelerate the commercialization of components essential to digital technologies, being a transversal vector for all the economic sectors and critical to wealth creation. Backed by a world-class infrastructure in the manufacturing fields micro-electro-mechanical systems (MEMS), advanced semiconductor assembly, quantum and printed electronics, C2MI is at the core of all industry sectors integrating components essential for the use and deployment of digital technologies. The Centre is strongly committed to be a unique model of collaboration, where synergy between industrial and academic partners is necessary, even essential, for the development of next-generation products.