Wafer Process Systems WPS-600-FA-SS

Wafer Process Systems WPS-600-FA-SS

Packaging assembly laboratory / Others / Chemical stripper and DI water rinse

Wafer Process Systems WPS-600-FA-SS

Supplier :

Wafer Process Systems Inc.

Model :

WPS-600-FA-SS

Purpose :

Chemical stripper and DI water rinse

CAPABILITY:

MultiMEGTM Megasonic generator:  2 central frequencies available (430kHz or 1.3MHz) with a sweep of 1% around the central frequency at 2.5-3.5kHz.  Maximum output power = 120W.

Chemical stripper tank has a capacity of 40l.  Heating element in the tank can increase the temperature of chemical up to 90°C.

Rinse tanks have each a capacity of 40l.  Can be operated in spray (tank#2 only) or soak (tank#1 and #2) mode.

Dryer tank: air or N2 can be used.  Maximum operating temperature = 100°C

Touchscreen interface allows user to control all operations (open/close valves; activate/deactivate pumps, Megasonic, etc.)

All wet bench components made in stainless steel and Teflon.

To obtain more information about this equipment, email us !

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