CAPABILITY

Single chamber DUV Phototabilizer;

Compatible with 200mm and 150mm wafers sizes;

UV Bake process applications;

Irradiator contains Hg high intensity lamp and 2.45 GHz magnetrons

Two-cassette stations;

High power, 275 ± 45 mW/cm², and low power, 105 ± 30 mW/cm²,  modes

Excellent Uniformity