Integrated microsystems laboratory (MEMS) / Dry etching / 02 plasma polymers strip
Ulvac Enviro 1Xa
Supplier :
ULVAC
Model :
Enviro-1Xa 200 mm
Purpose :
Single wafer advanced polymer asher
CAPABILITY:
Choice of plasma sources
Forming gas 3.5% provides the advantage of catalysis for generation of atomic oxygen in plasma
Possibility of additional gas for removal of Bosch process polymers
Excellent uniformity and repeatability
High throughput
End-point detection
Very fast ashing of a variety of polymers:
