CAPABILITY:

Resolution:

• 0.5 nm @ 15 kV
• 0.8 nm @ 1 kV
• 1.0 nm @ 500 V

Magnification: 1X to 2000000X

Electron gun: Schottky thermal field emission

Probe current: 3 pA to 20 nA

Acceleration voltage: 0,02 to 30 kV

Variable pressure mode (10 to 60 Pa)

Secondary electron Everhart-Thornley detector

In Lens secondary electron detector 

BxE Backscattered electron detector

aBSD4 Backscattered electron detector)

VPSE detector (variable pressure mode)

Specimen stage

X: 153 mm

Y: 153 mm

Z: 50 mm

Z’: 13 mm

Tilt: -15 to 70 degrees

Rotation: 360 degrees continuous

X-Rays Energy dispersive spectrometer (EDS): Oxford Ultim Max allowing elemental chemical analysis.