Integrated microsystems laboratory (MEMS) / Dry etching / Dielectric etch
SPTS Versalis FxP APS module
Supplier :
SPTS
Model :
Versalis FxP APS module
Purpose :
Dry etch cluster tool
CAPABILITY:
Dielectric etch module
Tailored chamber design to increase the process stability
Plasma density necessary for the successful etching of strongly bonded materials
