Integrated microsystems laboratory (MEMS) / Dry etching / 02 plasma polymers strip
SPTS Versalis FxP ISOPOD module
Supplier :
SPTS
Model :
Versalis FxP ISOPOD module
Purpose :
Dry etch cluster tool
CAPABILITY:
Isopod – in-situ resist removal
In-situ strip for corrosion prevention
Isotropic polyimide removal (dry release)
