CAPABILITY: Modular metrology platform: 300X300X200mm Accuracy: 3 µm (z axis) Tech. specs: mfd 2nm/mm, sigma/step inf. 3nm 2 on-board indexed

Capability: Modular metrology platform: 300X300X200mm Accuracy: 3 µm (z axis) Tech. specs: mfd 2nm/mm, sigma/step inf. 3nm 2 on-board indexed