CAPABILITY 

Working volume 21’’ H x 14.5’’ W x 27 ‘’D

9 quartz shelves in the chamber

Electrode on chamber side

PC controlled

Two gas lines with individual mass flow controllers and isolation valves (O₂ TBD)

Fast and slow vent controls

Capacitance manometer pressure measurement over the 0-2 Torr. range

Convectron pressure measurement from 2 Torr. to atmosphere

0-600 watt, 13.56 MHz, solid-state generator

Automatic impedance matching network with fast automatic tuning