Integrated microsystems laboratory (MEMS) / Dry etching / 02 plasma polymers strip
SPTS Versalis FxP ISOPOD module
CAPABILITY:
Isopod – in-situ resist removal
In-situ strip for corrosion prevention
Isotropic polyimide removal (dry release)
Integrated microsystems laboratory (MEMS) / Dry etching / 02 plasma polymers strip
CAPABILITY:
Isopod – in-situ resist removal
In-situ strip for corrosion prevention
Isotropic polyimide removal (dry release)