CAPACITY:

Irradiation on a section of wafer: 310 mm Ø

Irradiation over the entire surface: 382 mm Ø

Applicable frame dimension: 300 mm Ø, SEMI standard or equivalent

Lamp:

HHL-2800 / B-FL
type without ozone
dominant wavelength of 365 nm
maximum power of 2.8 kW

UV illuminator: 120 mW / cm2

Oxygen concentration during irradiation: 5% or less