SPTS Versalis FxP ICP module

SPTS Versalis FxP ICP module

Integrated microsystems laboratory (MEMS) / Dry etching / Metal etch

SPTS Versalis FxP ICP module

Supplier :

SPTS

Model :

Versalis FxP ICP module

Purpose :

Dry etch cluster tool

CAPABILITY:

Metal etch module

Patented high density plasma source incorporating a radial coil design

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