CAPABILITY: Process chamber: Material Aluminum Volume 91 liters Inner dim. 450 x 450 x 450 mm ( H x W

CAPABILITY  Working volume 21’’ H x 14.5’’ W x 27 ‘’D 9 quartz shelves in the chamber Electrode on chamber

CAPABILITY: High speed, uniform plasma cleaner Parallel plate RF back-sputtering method O2 (option Ar) High frequency power source 100 W

CAPABILITY: Stainless steel vacuum chamber 18 W x24 H x 18 D inches One electrode technology shelf-sets with 14 positions