CAPABILITY: Input/output Jedec tray Multiple axes (Cartesian) gantry system with two independents heads. X-Y placement accuracy +/- 50 µm Encoder
CAPABILITY: Internal chamber volume 11 cubic feet 38 x 20 x 26 inches (W x D x H) Chamber interior,
CAPABILITY: Stainless steel vacuum chamber 18 W x24 H x 18 D inches One electrode technology shelf-sets with 14 positions
CAPABILITY: Advanced variable frequency microwave (VFM) 700 W high power amplifier (500W useable) Broadband frequency control from 5.8 to 7.0
- 1
- 2